three-dimensional integration for imaging of X-rays. The design details of the VIPIC1 chip
are presented and are followed by results of testing of the chip. The VIPIC1 chip was
designed in a 130 nm process, in which through silicon vias are embedded right after the
front-end-of-line processing. The integration of tiers is achieved by the Cu-Cu thermo-
compression or Cu-based oxide-oxide bonding. The VIPIC1 readout integrated circuit was …