Design and tests of the vertically integrated photon imaging chip

GW Deptuch, G Carini, P Gryboś… - … on Nuclear Science, 2014 - ieeexplore.ieee.org
GW Deptuch, G Carini, P Gryboś, P Kmon, P Maj, M Trimpl, DP Siddons, R Szczygieł…
IEEE Transactions on Nuclear Science, 2014ieeexplore.ieee.org
The Vertically Integrated Photon Imaging Chip (VIPIC) project explores opportunities of the
three-dimensional integration for imaging of X-rays. The design details of the VIPIC1 chip
are presented and are followed by results of testing of the chip. The VIPIC1 chip was
designed in a 130 nm process, in which through silicon vias are embedded right after the
front-end-of-line processing. The integration of tiers is achieved by the Cu-Cu thermo-
compression or Cu-based oxide-oxide bonding. The VIPIC1 readout integrated circuit was …
The Vertically Integrated Photon Imaging Chip (VIPIC) project explores opportunities of the three-dimensional integration for imaging of X-rays. The design details of the VIPIC1 chip are presented and are followed by results of testing of the chip. The VIPIC1 chip was designed in a 130 nm process, in which through silicon vias are embedded right after the front-end-of-line processing. The integration of tiers is achieved by the Cu-Cu thermo-compression or Cu-based oxide-oxide bonding. The VIPIC1 readout integrated circuit was designed for high timing resolution, pixel based, X-ray Photon Correlation Spectroscopy experiments typically using 8 keV X-rays at a synchrotron radiation facility. The design was done for bonding a Silicon pixel detector, however other materials can be serviced as long as the positive polarity of charge currents is respected.
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