Looking at the increasing scope of plasma processing of materials surface, here we present
the development and diagnostics of a microwave assisted Electron Cyclotron Resonance
(ECR) plasma system suitable for surface modification of polymers. Prior to the surface-
treatment, a detailed diagnostic mapping of the plasma parameters throughout the reactor
chamber was carried out by using single and double Langmuir probe measurements in Ar
plasma. Conventional analysis of IV curves as well as the elucidation form of the Electron …