Digital MEMS switch for planar photonic crossconnects
L Fan, S Gloeckner, PD Dobblelaere… - Optical Fiber …, 2002 - opg.optica.org
L Fan, S Gloeckner, PD Dobblelaere, S Patra, D Reiley, C King, T Yeh, J Gritters, S Gutierrez…
Optical Fiber Communication Conference, 2002•opg.optica.org… Summary In conclusion we have demonstrated fully nonblocking 16 × 16 switches in a
single chip solution using MEMS fabricated by a surface micro-machining. We have shown
how the critical mechanical elements of the MEMS-cell have been chosen to achieve large
mechanical movement, high angular repeatability of the movement, and high reliability of
the actuation mechanism, which translated into low loss and high reliability of the packaged
component. Test results for these components have been presented. … In this paper, we …
single chip solution using MEMS fabricated by a surface micro-machining. We have shown
how the critical mechanical elements of the MEMS-cell have been chosen to achieve large
mechanical movement, high angular repeatability of the movement, and high reliability of
the actuation mechanism, which translated into low loss and high reliability of the packaged
component. Test results for these components have been presented. … In this paper, we …
Abstract
Optical switches are data rate and protocol independent, which makes them attractive for optical networks. 1–3 Free-space optical switches offer low loss, PDL, and cross-talk. MEMS-based approaches to miniaturize opto-mechanical switches have been proposed.
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