Dual plasma microwave apparatus and method for treating a surface
TA Roppel, J Asmussen, DK Reinhard - US Patent 4,691,662, 1987 - Google Patents
A plasma apparatus which generates a radio frequency (UHF or microwave) disk plasma 16
and a hybrid plasma 45 derived from the disk plasma. The microwave plasma acts as a
source of excited ion and free radical species and electrons for the second plasma which is
hybrid in that it contains species from both microwave and dc (or rf depending on bias)
excitation. The hybrid plasma can be used to treat an article 43 with different species than
are present in the disk plasma and provides more control in this regard than a single …
and a hybrid plasma 45 derived from the disk plasma. The microwave plasma acts as a
source of excited ion and free radical species and electrons for the second plasma which is
hybrid in that it contains species from both microwave and dc (or rf depending on bias)
excitation. The hybrid plasma can be used to treat an article 43 with different species than
are present in the disk plasma and provides more control in this regard than a single …
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