EIS capacitance diagnosis of nanoporosity effect on the corrosion protection of DLC films
An electrochemical impedance spectroscopy (EIS) capacitance diagnostic method was
developed to measure the nanoporosity in DC magnetron-sputtered diamond-like carbon
(DLC) films deposited on highly conductive silicon (111) substrates. The measurement was
based on a calibration of artificial defects enclosed in a well-defined area. Films of known
nanoporosity, as determined by EIS, were used to study the effect of nanopores on the
corrosion protection behavior of DLC films in sulfuric acid. EIS was also used to determine …
developed to measure the nanoporosity in DC magnetron-sputtered diamond-like carbon
(DLC) films deposited on highly conductive silicon (111) substrates. The measurement was
based on a calibration of artificial defects enclosed in a well-defined area. Films of known
nanoporosity, as determined by EIS, were used to study the effect of nanopores on the
corrosion protection behavior of DLC films in sulfuric acid. EIS was also used to determine …
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