Effect of annealing on the properties of transparent conducting Ag doped ZnO thin films prepared by rf magnetron sputtering method
Ag doped ZnO thin films were prepared by rf magnetron sputtering method and then heat
treated at 450° C in 2 h in different ambients (air, O 2/O 3). Evolution of morphology, optical
and electrical properties of the as-prepared thin films upon annealing environments was
studied. XRD analysis demonstrated that annealing had resulted in better crystallization as
well as higher transparence. Optical absorption showed that the band gap of the films also
reduced after heat treatment. The results also showed that conductivity of the films could be …
treated at 450° C in 2 h in different ambients (air, O 2/O 3). Evolution of morphology, optical
and electrical properties of the as-prepared thin films upon annealing environments was
studied. XRD analysis demonstrated that annealing had resulted in better crystallization as
well as higher transparence. Optical absorption showed that the band gap of the films also
reduced after heat treatment. The results also showed that conductivity of the films could be …
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