[PDF][PDF] Effect of multilayer structure on electromechanical characteristics of RF MEMS capacitive Symmetric Toggle Switch for X-band applications

K Maninder, KJ Rangra, D Kumar… - Proceeding of ISSS …, 2008 - researchgate.net
K Maninder, KJ Rangra, D Kumar, S Kumar, N Girdhar, P Boora, S Maurya, S Singh
Proceeding of ISSS-08 held on July, 2008researchgate.net
This paper presents the electromagnetic analysis and structural optimization of multi-metal
layer bridge of Symmetric Toggle Switch (STS) designed for X-band communication
applications. Simulated electrical and electromechanical response of multi-metal layer STS
is compared with single layer structure. Proposed fabrication process using surface
micromachining and metal electroplating is also presented. The switching element consists
of two torsion actuators joined together by connecting levers and a central bridge …
Abstract
This paper presents the electromagnetic analysis and structural optimization of multi-metal layer bridge of Symmetric Toggle Switch (STS) designed for X-band communication applications. Simulated electrical and electromechanical response of multi-metal layer STS is compared with single layer structure. Proposed fabrication process using surface micromachining and metal electroplating is also presented. The switching element consists of two torsion actuators joined together by connecting levers and a central bridge-transmission line overlap plate. In comparison to a single gold layer STS, the isolation for multilayer (Cr/Au) STS degrades from-45dB to-40dB with an increase of 3-4 volts in pullin voltage.
researchgate.net
以上显示的是最相近的搜索结果。 查看全部搜索结果