Effect of porosity and microstructure on the functionality of capacitive pressure sensors

A Kumar - Materials Chemistry and Physics, 2023 - Elsevier
Materials Chemistry and Physics, 2023Elsevier
We have developed a wide variety of capacitive pressure sensors, and the performance was
enhanced by introducing the porosity and micro-structuring to the PDMS layer using different
methods. The impact of the dielectric layer's porosity and micro-structuring on the key
parameters of the developed sensors was also studied. Among various developed sensors,
the pressure sensor with sponge PDMS dielectric layer created using a sugar cube (highly
porous) exhibits the best performance, with a detection limit of 0.2 Pa and response/recovery …
Abstract
We have developed a wide variety of capacitive pressure sensors, and the performance was enhanced by introducing the porosity and micro-structuring to the PDMS layer using different methods. The impact of the dielectric layer's porosity and micro-structuring on the key parameters of the developed sensors was also studied. Among various developed sensors, the pressure sensor with sponge PDMS dielectric layer created using a sugar cube (highly porous) exhibits the best performance, with a detection limit of 0.2 Pa and response/recovery time of 100/100 ms. It also offers a 152% relative difference in capacitance for the external pressure of 111 kPa and giant sensitivity of 0.078 Pa-1 in the pressure domain of 1–5 Pa with high working stability. Its outstanding performance indicates that it is a suitable pressure sensor for medical and pressure applications.
Elsevier
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