Effect of the electronic subsystem excitation on the ionisation probability of atoms sputtered from metals by atomic and molecular projectiles
SF Belykh, IA Wojciechowski, VV Palitsin, AV Zinoviev… - Surface science, 2001 - Elsevier
In the present work an effect of excitation of the metal electronic subsystem on the ionisation
probability of atoms sputtered under fast ion bombardment has been studied. Atomic and
molecular primary ions with the same velocity were used to produce different degrees of the
electronic excitations. Information on the ionisation probability was obtained from the kinetic
energy distributions of Nb+ and Ta+ ions sputtered from the respective clean Nb and Ta
targets by Aum− projectiles (1⩽ m⩽ 3) with the energy of E0= 6 keV per atom. It was found …
probability of atoms sputtered under fast ion bombardment has been studied. Atomic and
molecular primary ions with the same velocity were used to produce different degrees of the
electronic excitations. Information on the ionisation probability was obtained from the kinetic
energy distributions of Nb+ and Ta+ ions sputtered from the respective clean Nb and Ta
targets by Aum− projectiles (1⩽ m⩽ 3) with the energy of E0= 6 keV per atom. It was found …
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