Effects of defect creation on bidirectional behavior with hump characteristics of InGaZnO TFTs under bias and thermal stress

H Im, H Song, J Jeong, Y Hong… - Japanese Journal of …, 2015 - iopscience.iop.org
H Im, H Song, J Jeong, Y Hong, Y Hong
Japanese Journal of Applied Physics, 2015iopscience.iop.org
We investigated the hump characteristics of amorphous indium–gallium–zinc oxide thin-film
transistors. The device showed a field effect mobility of 24.3 cm 2 V− 1 s− 1, a threshold
voltage (V th) of 4.8 V, and a subthreshold swing of 120 mV/dec. Under positive gate bias
stress, V th showed bidirectional shift with a hump. V th was positively and negatively shifted
in the above-threshold and subthreshold regions, respectively. At high temperatures, V th
was more positively shifted without bidirectional shift. Under simultaneous drain bias stress …
Abstract
We investigated the hump characteristics of amorphous indium–gallium–zinc oxide thin-film transistors. The device showed a field effect mobility of 24.3 cm 2 V− 1 s− 1, a threshold voltage (V th) of 4.8 V, and a subthreshold swing of 120 mV/dec. Under positive gate bias stress, V th showed bidirectional shift with a hump. V th was positively and negatively shifted in the above-threshold and subthreshold regions, respectively. At high temperatures, V th was more positively shifted without bidirectional shift. Under simultaneous drain bias stress (V DS, stress), the hump was maintained. However, the bidirectional shift was not observed with an increasing V DS, stress. The hump and positive shift are related to the defect creation of the shallow donor-like and deep-level acceptor-like states, respectively. We performed a two-dimensional device simulation to further investigate this phenomenon. By varying the peak values of the Gaussian shallow donor-like and deep acceptor-like states, we qualitatively confirmed the relationship between the two states and transfer curve changes.
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