Yttria-stabilized zirconia free-standing membranes were fabricated by pulsed laser
deposition on Si/SiO2/Si3N4 structures for developing silicon-based micro devices for micro
solid oxide fuel cell applications. Their mechanical stability under working conditions was
evaluated satisfactorily by applying thermal cycling to the membranes. Membranes
mechanically stable at operating temperatures as high as 700° C were obtained for
deposition temperatures in the range between 400 and 700° C. Thermomechanical …