SiO2 nanofibers have been produced by the electrospinning method by two different
approaches: direct spinning of silica precursor-containing nanofibers and spinning of
polymer nanofibers followed by sol–gel silica coating. After pyrolysis of the resulting
materials, both methods yield silica nanofibers. We extend this work by coating the silica
nanofibers with AlN films using a reactive magnetron sputtering technique. Substrate
temperature, input gas composition and radio frequency (rf) power are the critical operating …