A light beam steering device includes a mirror plate that is mechanically coupled directly (or
indirectly) to an optically transmissive substrate by flexures that permit the mirror plate to tilt
around a plurality of axes when electrodes are controlled to cause the mirror plate tilting.
The optically transmissive substrate is spaced apart from a device substrate so that the
mirror plate is between the optically transmissive and device substrates. Electrically
conductive electrodes are formed on the device substrate opposite the mirror plate. The …