Enhanced Solar-Blind Photodetection Performance of Encapsulated Ga2O3 Nanocrystals in Al2O3 Matrix

S Rajamani, K Arora, A Belov, D Korolev… - IEEE Sensors …, 2018 - ieeexplore.ieee.org
S Rajamani, K Arora, A Belov, D Korolev, A Nikolskaya, Y Usov, D Pavlov, A Mikhaylov
IEEE Sensors Journal, 2018ieeexplore.ieee.org
Gallium oxide nanocrystals encapsulated in Al 2 O 3 film on a Si substrate have been
synthesized by using ion implantation followed by thermal annealing at 800° C or 900° C.
Formation of β-Ga 2 O 3 nanocrystals is confirmed by transmission electron microscopy. The
photoresponse of a photodetector fabricated on the implanted layer by the deposition of
interdigitated electrode pattern is estimated by analyzing the current-voltage characteristics.
The ratio of photocurrent at the wavelength of 250 nm and a voltage of 4 V to dark current …
Gallium oxide nanocrystals encapsulated in Al 2 O 3 film on a Si substrate have been synthesized by using ion implantation followed by thermal annealing at 800 °C or 900 °C. Formation of β-Ga 2 O 3 nanocrystals is confirmed by transmission electron microscopy. The photoresponse of a photodetector fabricated on the implanted layer by the deposition of interdigitated electrode pattern is estimated by analyzing the current-voltage characteristics. The ratio of photocurrent at the wavelength of 250 nm and a voltage of 4 V to dark current around ~15 is found for the sample annealed at 900 °C. The spectral dependence of photoresponse for this sample demonstrates excellent solar-blind ultraviolet characteristics in the wavelength range of 250-270 nm with a rejection ratio 42 at the bias of 1 V. At the bias of 4 V, the responsivity of 50 mA/μW upon illumination at 250 nm and a cutoff at 280 nm are observed for the 900 °C annealing. The sample annealed at 800 °C shows lower ultraviolet responsivity due to the high density of defects. The data are analyzed in relation to the generation of carriers in Ga 2 O 3 nanocrystals and their transport in the damaged Al 2 O 3 matrix. The reported results pave the way toward the fabrication of next generation high sensitive solar-blind photodetectors.
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