A low-frequency capacitively coupled radio-frequency (rf) discharge in Ar excited at 1.76
MHz is studied both experimentally and theoretically. Experimental measurements of
electron concentration, discharge voltage and current are presented for a wide range of rf
input powers. The rf current shape is nonsinusoidal, close to the triangle one. The evolution
of Ar (2p1) emission excitation function in the interelectrode gap during an rf cycle is
measured using the phase-resolved optical emission spectroscopy technique. Theoretical …

… Investigation of the low frequency capacitive coupled RF discharge in Ar excited at 1.76
MHz is performed both experimentally and theoretically. Experimental measurements of
electron concentration, discharge voltage and current are presented for a wide range of
input power. The … This study is crucial for further treatment of dual frequency discharges
with corresponding low frequency value. …