frequency (DF) radio-frequency discharges in Ar at pressures of 20 and 45 mtorr are
measured and calculated. A numerical simulation of the IEDF on the base of a self-
consistent particle-in-cell model with Monte Carlo collisions was performed. In addition, a
semianalytical model was developed to calculate the IEDF in collisionless and collisional SF
and DF plasmas. The IEDF width for the intermediate frequency case was determined from …