Titanate (BST) thin films are presented. A cascade of 10, 15 and 20 parallel plate varactors
were able to produce (150°, 258°, 297°),(218°, 381°, 443°) and (227°, 402°, 464°) phase
shift at (5, 10, 12 GHz) respectively. The 360° phase shift is achieved with small device size,
low bias voltages (0-8 V), low leakage currents, low insertion loss and high figure of merit
(FOM). FOM of 40, 33, 24 Degrees/dB is achieved with 10, 15 and 20 shunt varactors at 12 …