Experimentally established correlation between ion charge state distributions and kinetic ion energy distributions in a direct current vacuum arc discharge
DC arc plasmas from Al, Ti, Cu, Mo, and W cathodes have been characterized with respect
to plasma chemistry and charge-state-resolved ion energy. The evaluated average
ionization energies in the plasmas were found to be linearly correlated with the kinetic ion
energies. This was further supported by evaluation of previously published data for 42
elements. A comparison of the total ion kinetic energy distribution and the corresponding ion
charge state distribution, as defined by the ionization energies of the constituent ions …
to plasma chemistry and charge-state-resolved ion energy. The evaluated average
ionization energies in the plasmas were found to be linearly correlated with the kinetic ion
energies. This was further supported by evaluation of previously published data for 42
elements. A comparison of the total ion kinetic energy distribution and the corresponding ion
charge state distribution, as defined by the ionization energies of the constituent ions …
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