implanted photonic crystal (PhC) nanocavity that is connected to input/output waveguides is
described. A high dose of Ar+ is introduced, and annealing is used to recrystallize the silicon
and thus create dislocation loops at the center of the PhC slab. Dislocation loops enable the
fast recombination of the carriers, which allows a fast switching recovery time for PhC
switches. The switching window (∼ 70 ps) is three times smaller than that without ion …