Deposition of a hydrothermal method has a number of advantages; low deposition
temperature, high-purity, deposition on a three-dimensional structure, and a large thickness.
The present paper investigates the improvement of an epitaxial lead zirconate titanate (PZT)
thin film deposited via hydrothermal synthesis. The critical parameter contributing to the film
morphology was revealed to be the holding position of the reaction solution during
deposition. In addition to this improvement, the SrRuO 3 bottom electrode was confirmed to …