First high-g measurement by thermal accelerometers

A Garraud, P Combette, JM Gosalbes… - … Solid-State Sensors …, 2011 - ieeexplore.ieee.org
2011 16th International Solid-State Sensors, Actuators and …, 2011ieeexplore.ieee.org
In the present work, the design and experimental set-up conditions of a micromachined
accelerometer based on convection heat transfer are reviewed. The effects on sensitivity are
analytically studied and allow discussion of the linearity range. They are confirmed by
simulation and experimental results. With optimized experimental parameters, we achieve
for the first time high-g measurements of up to 10,000 g with a thermal accelerometer.
In the present work, the design and experimental set-up conditions of a micromachined accelerometer based on convection heat transfer are reviewed. The effects on sensitivity are analytically studied and allow discussion of the linearity range. They are confirmed by simulation and experimental results. With optimized experimental parameters, we achieve for the first time high-g measurements of up to 10,000 g with a thermal accelerometer.
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