Flat single crystal Ge membranes for sensors and opto-electronic integrated circuitry
A thin, flat and single crystal membrane on which to mount sensors is generally required for
integration with electronics through standard silicon processing technology. We present an
approach to producing single crystal membranes of germanium with in-built tensile strain,
which serves to keep the membrane flat and ripple free, and demonstrate a 600 nm thick,
free-standing 1 mm 2 Ge membrane. We convert the fabrication technique into an integrated-
circuit compatible wafer scale process to produce 60 nm thin membranes with large areas of …
integration with electronics through standard silicon processing technology. We present an
approach to producing single crystal membranes of germanium with in-built tensile strain,
which serves to keep the membrane flat and ripple free, and demonstrate a 600 nm thick,
free-standing 1 mm 2 Ge membrane. We convert the fabrication technique into an integrated-
circuit compatible wafer scale process to produce 60 nm thin membranes with large areas of …
以上显示的是最相近的搜索结果。 查看全部搜索结果