Fully integrated bidirectional CMOS-MEMS flow sensor with low power pulse operation

M Ahmed, W Xu, S Mohamad, F Boussaid… - IEEE Sensors …, 2019 - ieeexplore.ieee.org
IEEE Sensors Journal, 2019ieeexplore.ieee.org
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow
sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas
flow. Our SoC features a very low-noise instrumentation amplifier that is implemented on a
CMOS wafer and serves as a readout integrated circuit for a thermoresistive micro-
calorimetric flow sensor which is fabricated on a MEMS wafer. A compact heterogeneous
integration is achieved by combining the two wafers via the proprietary InvenSense AlN …
Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas flow. Our SoC features a very low-noise instrumentation amplifier that is implemented on a CMOS wafer and serves as a readout integrated circuit for a thermoresistive micro-calorimetric flow sensor which is fabricated on a MEMS wafer. A compact heterogeneous integration is achieved by combining the two wafers via the proprietary InvenSense AlN process. The measured sensitivity of our CMOS MEMS flow sensor is 98 mV/sccm which is three times better than the state-of-the-art counterpart. The flow range measured by our SoC is from -26 to 26 m/s (from -50 to 50 sccm). Moreover, the pulsed heater operation makes this proposed SoC flow sensor a very low power (<;9 mW) and, thus, a promising candidate for the Internet-of-Things applications in smart home/green buildings.
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