Generalized ellipsometry for monoclinic absorbing materials: determination of optical constants of Cr columnar thin films

D Schmidt, B Booso, T Hofmann, E Schubert… - Optics letters, 2009 - opg.optica.org
Optics letters, 2009opg.optica.org
Generalized spectroscopic ellipsometry is used to determine the form-induced birefringence
and monoclinic optical constants of chromium columnar thin films. The slanted nanocolumns
were deposited by glancing angle deposition under 85° incidence and are tilted from the
surface normal. Dichroism measured for wavelengths from 400to1000 nm renders the Cr
nanocolumns monoclinic absorbing crystals with c axis along the nanocolumns axis, b axis
parallel to the film interface, and 74.8° monoclinic angle between a and c axes. The …
Generalized spectroscopic ellipsometry is used to determine the form-induced birefringence and monoclinic optical constants of chromium columnar thin films. The slanted nanocolumns were deposited by glancing angle deposition under 85° incidence and are tilted from the surface normal. Dichroism measured for wavelengths from 400to1000 nm renders the Cr nanocolumns monoclinic absorbing crystals with c axis along the nanocolumns axis, b axis parallel to the film interface, and 74.8° monoclinic angle between a and c axes. The columnar thin film reveals anomalous optical dispersion, extreme birefringence, and strong dichroism and differs entirely from bulk chromium.
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