Growth of lithium tantalate thin films by radio-frequency magnetron sputtering with lithium enriched target
L Nougaret, P Combette, F Pascal-Delannoy - Thin Solid Films, 2009 - Elsevier
LiTaO3 thin films were deposited by radio-frequency magnetron sputtering with a Li
enriched target composed of Li2O2/Ta2O5 (55: 45 at.%). Morphology, crystallinity, dielectric
and pyrolectric properties of thin films of LiTaO3 are studied according to the temperature of
deposition and the nature of the back electrode (Ru/RuO2 and RuO2). In order to develop
thermal microsensors containing pyrolectric thin layers deposited on membranes of SiNx
ensuring the thermal isolation of the device, the final aim is to improve the pyroelectric …
enriched target composed of Li2O2/Ta2O5 (55: 45 at.%). Morphology, crystallinity, dielectric
and pyrolectric properties of thin films of LiTaO3 are studied according to the temperature of
deposition and the nature of the back electrode (Ru/RuO2 and RuO2). In order to develop
thermal microsensors containing pyrolectric thin layers deposited on membranes of SiNx
ensuring the thermal isolation of the device, the final aim is to improve the pyroelectric …
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