Heterodyne picosecond thermoreflectance applied to nanoscale thermal metrology
S Dilhaire, G Pernot, G Calbris, JM Rampnoux… - Journal of Applied …, 2011 - pubs.aip.org
Picosecond thermoreflectance is an unprecedented powerful technique for nanoscale heat
transfer analysis and metrology, but different sources of artifacts were reported in the
literature making this technique difficult to use for long delay (several ns) thermal analysis.
We present in this paper a new heterodyne picosecond thermoreflectance (HPTR)
technique. As it uses two slightly frequency shifted lasers instead of a mechanical translation
stage, it is possible to avoid all artifacts leading to erroneous thermal parameter …
transfer analysis and metrology, but different sources of artifacts were reported in the
literature making this technique difficult to use for long delay (several ns) thermal analysis.
We present in this paper a new heterodyne picosecond thermoreflectance (HPTR)
technique. As it uses two slightly frequency shifted lasers instead of a mechanical translation
stage, it is possible to avoid all artifacts leading to erroneous thermal parameter …