High quality planar silicon nitride microdisk resonators for integrated photonics in the visiblewavelength range
ES Hosseini, S Yegnanarayanan, AH Atabaki… - Optics express, 2009 - opg.optica.org
Optics express, 2009•opg.optica.org
High quality factor (Q≈ 3.4× 10^ 6) microdisk resonators are demonstrated in a Si_3N_4 on
SiO_2 platform at 652–660 nm with integrated in-plane coupling waveguides. Critical
coupling to several radial modes is demonstrated using a rib-like structure with a thin
Si_3N_4 layer at the air-substrate interface to improve the coupling.
SiO_2 platform at 652–660 nm with integrated in-plane coupling waveguides. Critical
coupling to several radial modes is demonstrated using a rib-like structure with a thin
Si_3N_4 layer at the air-substrate interface to improve the coupling.
High quality factor (Q ≈ 3.4×10^6) microdisk resonators are demonstrated in a Si_3N_4 on SiO_2 platform at 652–660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si_3N_4 layer at the air-substrate interface to improve the coupling.
opg.optica.org
以上显示的是最相近的搜索结果。 查看全部搜索结果