High throughput fabrication of transition-metal-doped epitaxial ZnO thin films: A series of oxide-diluted magnetic semiconductors and their properties

Z Jin, T Fukumura, M Kawasaki, K Ando, H Saito… - Applied Physics …, 2001 - pubs.aip.org
Combinatorial laser molecular-beam epitaxy method was employed to fabricate epitaxial
ZnO thin films doped with all the 3d transition metal (TM) ions in a high throughput fashion.
The solubility behavior of TM ions was discussed from the viewpoints of the ionic radius and
valence state. The magneto-optical responses coincident with absorption spectra were
observed for Mn-and Co-doped samples. Cathodoluminescence spectra were studied for Cr-
, Mn-, Fe-, and Co-doped samples, among which Cr-doped ZnO showed two sharp peaks at …
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