High-isolation CPW MEMS shunt switches. 1. Modeling

JB Muldavin, GM Rebeiz - IEEE transactions on microwave …, 2000 - ieeexplore.ieee.org
JB Muldavin, GM Rebeiz
IEEE transactions on microwave theory and techniques, 2000ieeexplore.ieee.org
This paper, the first of two parts, presents an electromagnetic model for membrane
microelectromechanical systems (MEMS) shunt switches for microwave/millimeter-wave
applications. The up-state capacitance can be accurately modeled using three-dimensional
static solvers, and full-wave solvers are used to predict the current distribution and
inductance of the switch. The loss in the up-state position is equivalent to the coplanar
waveguide line loss and is 0.01-0.02 dB at 10-30 GHz for a 2-/spl mu/m-thick Au MEMS …
This paper, the first of two parts, presents an electromagnetic model for membrane microelectromechanical systems (MEMS) shunt switches for microwave/millimeter-wave applications. The up-state capacitance can be accurately modeled using three-dimensional static solvers, and full-wave solvers are used to predict the current distribution and inductance of the switch. The loss in the up-state position is equivalent to the coplanar waveguide line loss and is 0.01-0.02 dB at 10-30 GHz for a 2-/spl mu/m-thick Au MEMS shunt switch. It is seen that the capacitance, inductance, and series resistance can be accurately extracted from DC-40 GHz S-parameter measurements. It is also shown that dramatic increase in the down-state isolation (20/sup +/ dB) can be achieved with the choice of the correct LC series resonant frequency of the switch. In part 2 of this paper, the equivalent capacitor-inductor-resistor model is used in the design of tuned high isolation switches at 10 and 30 GHz.
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