High-resolution optical angle sensors: approaching the diffraction limit to the sensitivity

A García-Valenzuela, GE Sandoval-Romero… - Applied …, 2004 - opg.optica.org
Applied optics, 2004opg.optica.org
We carry out a detailed analysis of angle-sensitive devices based on the critical-angle effect.
We consider their use in measuring small angular deflections of a laser beam. We establish
the diffraction limit to the sensitivity for optical-angle sensors based on reflection and
transmission of a laser beam. We find that this limit is identical to that of the triangulation
scheme when using a position-sensitive detector or the autocollimation scheme. We analyze
the main proposals to date of optical-angle sensors based on the critical-angle effect …
We carry out a detailed analysis of angle-sensitive devices based on the critical-angle effect. We consider their use in measuring small angular deflections of a laser beam. We establish the diffraction limit to the sensitivity for optical-angle sensors based on reflection and transmission of a laser beam. We find that this limit is identical to that of the triangulation scheme when using a position-sensitive detector or the autocollimation scheme. We analyze the main proposals to date of optical-angle sensors based on the critical-angle effect, focusing on their maximum sensitivity and their polarization dependence in practical conditions. We propose and analyze theoretically a novel and simple angle-sensitive device for sensing optical-beam deflections with very low polarization dependence and a maximum sensitivity close to the diffraction limit when used with typical laser beams. We discuss the basic principles for designing this type of device, provide numerical results, and point out a convenient fabrication procedure.
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