[HTML][HTML] Hybrid integration of chipscale photonic devices using accurate transfer printing methods

JA Smith, D Jevtics, B Guilhabert, MD Dawson… - Applied Physics …, 2022 - pubs.aip.org
Transfer printing is becoming widely adopted as a back-end process for the hybrid
integration of photonic and electronic devices. Integration of membrane components, with
micrometer-scale footprints and sub-micron waveguide dimensions, imposes strict
performance requirements on the process. In this review, we present an overview of transfer
printing for integrated photonics applications, covering materials and fabrication process
considerations, methods for efficient optical coupling, and high-accuracy inter-layer …
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