… the exposed porous dielectric cross-section by etching step … We intend to examine the impact
of medium-high temperature … in dense MSQ and porous low-k directly formed after dielectric …

… properties of low-k nano-porous silica and the impact of … performed with lithography and
etching processes. In our proposed … effects on the n-type poly-Si TFT with/without LDD structure …

… Solvent effect on the pore size of porous low-k films ........................… 2.5 Challenge of porous
low k integration Porous low k … uptake Porous low k may absorb moisture in wet etching, wet …

… layer on the top of porous or hybrid low-k films. Such thin but … by processing steps such
as CMP, post-etch cleaning, post-… to investigate the impact of porogens and porosity on the …

… the effect of different kinds of plasma on porous low-k … ) materials by using standard and
remote plasma methods, and … dielectric film worse such as the etching rate by HF, and because …

… in a stripline structure with spin-coated porous-SiLK low-k film. … Except the k value, the impact
of low-k materials on process … photo-lithography process and dielectric etch processes are …

… the structure-property relationship of NCS porous low-k thin … Their impact on the final properties
of NCS porous low-k thin film … the PSZ low-k film was subjected to etch or ash process; it …

… post-etch residues from patterned porous low-k dielectrics[J]. Journal of Vacuum Science
& Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and …

… process to observe the effect of silicon wafer material after laser drill. Parameters used in this
work are speed, path and power. The effect of … grooving on 45 nm low-k wafer is conducted. …

… compatibility of low-k materials on semiconductor process. On … and hardness due to decreasing
micro-porous. However, a bit … Cu and low-k film as Cu diffusion barrier and etching stop …