Improving charge retention in capacitorless DRAM through material and device innovation

MHR Ansari, N Navlakha, JT Lin… - Japanese Journal of …, 2019 - iopscience.iop.org
MHR Ansari, N Navlakha, JT Lin, A Kranti
Japanese Journal of Applied Physics, 2019iopscience.iop.org
In this work, we report on the opportunities to enhance the retention time (RT) of an
accumulation mode capacitorless DRAM (1T-DRAM) through appropriate material
optimization by analyzing different semiconductor materials (Si, Ge, Si 1− x Ge x and GaAs).
It is shown that the RT can be considerably enhanced through a combination of (i) a higher
bandgap material and (ii) the separation of the storage region from the conduction region. A
higher bandgap (GaAs) material helps to achieve a deeper potential well, which reduces …
Abstract
In this work, we report on the opportunities to enhance the retention time (RT) of an accumulation mode capacitorless DRAM (1T-DRAM) through appropriate material optimization by analyzing different semiconductor materials (Si, Ge, Si 1− x Ge x and GaAs). It is shown that the RT can be considerably enhanced through a combination of (i) a higher bandgap material and (ii) the separation of the storage region from the conduction region. A higher bandgap (GaAs) material helps to achieve a deeper potential well, which reduces band-to-band tunneling, and thus, enhances the RT. The material optimization through GaAs and Ge-based 1T-DRAM achieves a maximum RT of∼ 2 s and maximum speed of∼ 45 ns, respectively, at a gate length of 50 nm at 85 C. Results also indicate the trade-off between retention and speed arising out the material properties. The work quantifies the role of material and device parameters for 1T-DRAM.
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