In situ synthesis of Si3N4 in the Na2SiF6–N2 system via CVD: Kinetics and mechanism of solid-precursor decomposition
AL Leal-Cruz, MI Pech-Canul - Solid State Ionics, 2007 - Elsevier
The kinetics of decomposition of Na2SiF6 in nitrogen to in situ synthesize Si3N4 was
investigated. First, an optimization of the following parameters for the thermal decomposition
was performed: nitrogen precursor (N2 or N2: NH3), processing time and temperature
range. According to the analysis of variance (ANOVA), the optimum conditions to maximize
the decomposition of Na2SiF6 are: N2, 120 min, and 465–873 K. Based on thermodynamic
predictions and evidence on the synthesis of Si3N4 during the thermal decomposition, it is …
investigated. First, an optimization of the following parameters for the thermal decomposition
was performed: nitrogen precursor (N2 or N2: NH3), processing time and temperature
range. According to the analysis of variance (ANOVA), the optimum conditions to maximize
the decomposition of Na2SiF6 are: N2, 120 min, and 465–873 K. Based on thermodynamic
predictions and evidence on the synthesis of Si3N4 during the thermal decomposition, it is …
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