Influence of bilayer resist processing on pin OLEDs: towards multicolor photolithographic structuring of organic displays

S Krotkus, F Nehm, R Janneck… - … and Devices XVII, 2015 - spiedigitallibrary.org
Recently, bilayer resist processing combined with development in hydrofluoroether (HFE)
solvents has been shown to enable single color structuring of vacuum-deposited state-of-the-
art organic light-emitting diodes (OLED). In this work, we focus on further steps required to
achieve multicolor structuring of pin OLEDs using a bilayer resist approach. We show that
the green phosphorescent OLED stack is undamaged after lift-off in HFEs, which is a
necessary step in order to achieve RGB pixel array structured by means of photolithography …

Influence of bilayer resist processing on pin OLEDs

S Krotkus, K Leo, S Reineke, F Nehm, R Janneck… - 2015 - tud.qucosa.de
Abstract (EN) Recently, bilayer resist processing combined with development in hydro
uoroether (HFE) solvents has been shown to enable single color structuring of vacuum-
deposited state-of-the-art organic light-emitting diodes (OLED). In this work, we focus on
further steps required to achieve multicolor structuring of pin OLEDs using a bilayer resist
approach. We show that the green phosphorescent OLED stack is undamaged after lift-off in
HFEs, which is a necessary step in order to achieve RGB pixel array structured by means of …
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