Influence of substrate nature on the growth of copper oxide thin films
Surface and Interface analysis, 2016•Wiley Online Library
Cu thin films were deposited on Si (111), glass, and quartz substrates by magnetron
sputtering. X‐ray diffraction, SEM, and photoemission electron microscope studies were
carried out to characterize the films. An influence of the nature of substrate on the Cu2O and
CuO phases formed was observed. Copper silicide formation in case of silicon substrates
aided in formation of Cu2O rather than CuO unlike glass and quartz substrates. Formation of
nanocrystallites was observed by SEM and X‐ray diffraction. Copyright© 2016 John Wiley & …
sputtering. X‐ray diffraction, SEM, and photoemission electron microscope studies were
carried out to characterize the films. An influence of the nature of substrate on the Cu2O and
CuO phases formed was observed. Copper silicide formation in case of silicon substrates
aided in formation of Cu2O rather than CuO unlike glass and quartz substrates. Formation of
nanocrystallites was observed by SEM and X‐ray diffraction. Copyright© 2016 John Wiley & …
Cu thin films were deposited on Si(111), glass, and quartz substrates by magnetron sputtering. X‐ray diffraction, SEM, and photoemission electron microscope studies were carried out to characterize the films. An influence of the nature of substrate on the Cu2O and CuO phases formed was observed. Copper silicide formation in case of silicon substrates aided in formation of Cu2O rather than CuO unlike glass and quartz substrates. Formation of nanocrystallites was observed by SEM and X‐ray diffraction. Copyright © 2016 John Wiley & Sons, Ltd.
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