containing thermal donors formed during a 450 degree C anneal step. Special attention is
given to the influence of a thermal pre-heat treatment at 300 degree C and the important role
played by oxygen micro fluctuations. The latter act as precursors for the formation of thermal
donors. The qualitative theoretical model, developed for explaining the experimental results
in Sn-free Czochralski Si and based on hetero-and homogeneous precipitation processes …