Investigation of thin-barrier AlGaN/GaN HEMT heterostructures for enhanced gas-sensing performance

A Ranjan, R Lingaparthi, N Dharmarasu… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
IEEE Sensors Journal, 2022ieeexplore.ieee.org
In this study, a theoretical relationship between two-dimensional electron gas (2DEG)
properties of AlGaN/GaN high-electron-mobility transistor (HEMT) hetero-structure and
various gas-sensing characteristics using this structure was established. Based on the
analytical study, it is proposed that a thinner barrier layer in AlGaN/GaN HEMT
heterostructure should result in lower detection limits, higher sensing response, and a faster
response time. To prove the analytical study, a thin-barrier (~ 8 nm) AlGaN/GaN HEMT …
In this study, a theoretical relationship between two-dimensional electron gas (2DEG) properties of AlGaN/GaN high-electron-mobility transistor (HEMT) hetero- structure and various gas-sensing characteristics using this structure was established. Based on the analytical study, it is proposed that a thinner barrier layer in AlGaN/GaN HEMT heterostructure should result in lower detection limits, higher sensing response, and a faster response time. To prove the analytical study, a thin-barrier (~8 nm) AlGaN/GaN HEMT structure was designed and grown to study its sensing characteristics. The results are compared with the thick-barrier (~18 nm) gas sensor structure. For the thin-barrier NO2 sensor, the sensing response increased by almost ten times when was changed by more than 25%. The sensor also showed a faster response time of 10 s when compared to the thick barrier sensor. Similarly, the thin-barrier NH3 sensor showed a remarkable improvement in sensing response by 17 times and by two times. Based on the response time, the thin-barrier NH3 sensor was also found to be 40% more faster compared to the thick-barrier AlGaN/GaN HEMT sensor.
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