as an integrated deflection sensor was applied to dynamic-mode atomic force microscopy
(AFM). This probe can be used for scanning near-field optical microscopy (SNOM) and
Kelvin-probe force microscopy (KFM). We adopted a frequency modulation (FM) detection
method not only to stabilize imaging conditions in dynamic-mode AFM but also to enhance
sensitivity for the detection of electrostatic forces in KFM measurement. We investigated …