Large-displacement parametric resonance using a shaped comb drive

C Guo, E Tatar, GK Fedder - 2013 IEEE 26th International …, 2013 - ieeexplore.ieee.org
2013 IEEE 26th International Conference on Micro Electro …, 2013ieeexplore.ieee.org
This paper is the first demonstration of large-stroke parametric resonance excited by an in-
plane “shaped-finger” electrostatic comb drive. A custom-shaped comb finger profile is used
to produce a quadratic capacitance-engagement response. The ability in selecting
electrostatic stiffness coefficients by engineering the comb finger profile allows the excitation
of the nonlinear parametric resonance for various applications such as the mode-matched
gyroscopes and gravimetric sensors. The shaped-finger comb enables the study of the …
This paper is the first demonstration of large-stroke parametric resonance excited by an in-plane “shaped-finger” electrostatic comb drive. A custom-shaped comb finger profile is used to produce a quadratic capacitance-engagement response. The ability in selecting electrostatic stiffness coefficients by engineering the comb finger profile allows the excitation of the nonlinear parametric resonance for various applications such as the mode-matched gyroscopes and gravimetric sensors. The shaped-finger comb enables the study of the parametric resonance in systems with high energy storage. The shaped-finger comb parametric resonator is fabricated by a 15 μm-thick SOI-MEMS process.
ieeexplore.ieee.org
以上显示的是最相近的搜索结果。 查看全部搜索结果