Laser‐induced reactions of platinum and other metal films with silicon
JM Poate, HJ Leamy, TT Sheng, GK Celler - Applied Physics Letters, 1978 - pubs.aip.org
We have reacted thin Pt. Pd, and Ni films with single-crystal Si using Q-switched Nd: YAG
laser pulses of loo-nsee duration in the power range 18-50 MW cm-2• The layers are
laterally very uniform in thickness but are not single phase. Average composition of the
reaction product layer can be changed over a wide range by varying film thickness and laser
power. The microstructure of the reacted layers indicates that reaction occurs via surface
melting, mixing, and rapid resolidification.
laser pulses of loo-nsee duration in the power range 18-50 MW cm-2• The layers are
laterally very uniform in thickness but are not single phase. Average composition of the
reaction product layer can be changed over a wide range by varying film thickness and laser
power. The microstructure of the reacted layers indicates that reaction occurs via surface
melting, mixing, and rapid resolidification.
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