Laser direct writing (LDW) has been used to pattern 90nm thick permalloy (Ni 81 Fe 19) into
1-D and 2-D microstructures with strong shape anisotropy. Sub-nanosecond laser pulses
were focused with a 0.75 NA lens to a 1.85 μm diameter spot, to achieve a fluence of
approximately 350 mJ. cm-2 and ablate the permalloy film. Computer-controlled sample
scanning then allowed structures to be defined. Scan speeds were controlled to give 30%
overlap between successive laser pulses and reduce the extent of width modulation in the …