Lithographically patterned polypyrrole multilayer microstructures via sidewall-controlled electropolymerization

M Synodis, JB Pyo, M Kim, X Wang… - … of Micromechanics and …, 2021 - iopscience.iop.org
Composite materials comprising multilayers of metal and conductive polymer can have
applications in sensing, biomedical, and energy storage/conversion scenarios. One attribute
of such metal/polymer composites is that they typically display highly anisotropic electrical
properties, which makes them useful as materials for microelectronic or magnetic devices.
However, incorporating the deposition of conductive polymers into scalable and
manufacturable fabrication processes can be challenging, as the mechanisms for …

Lithographically patterned polypyrrole multilayer microstructures via sidewall-controlled electropolymerization

MG Allen, MJ Synodis, JB Pyo - US Patent App. 18/024,737, 2023 - Google Patents
Methods and systems for producing metal/polymer multilayer microstructures. In some
examples, a method includes method for fabricating a multilayer microstructure using
sequential multilayer deposition. This method includes deposition of an active metal
containing desired physical, mechanical, and/or electrical properties, followed by the
deposition of a protective layer of an inert metal. Subsequently, a polymer layer is deposited
in which the deposition bath chemistry and conditions are optimized to control the growth …
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