[PDF][PDF] Lithography machine in-line broadband spectrum metrology
F Liu, F van de Wetering, M Bayraktar, F Bijkerk… - P43), EUVL …, 2019 - euvlitho.com
… • Source plasma emission spectrum measurement • Emission spectrum impact on
performance • Proposed metrology and control scheme in the scanner • Summary … •
Enables in-line broadband spectrum measurements • Provides extra feedback loop signal
for system broadband spectrum optimization … • It is advantageous to implement in-line
broadband spectrum metrology and control system in the scanner …
performance • Proposed metrology and control scheme in the scanner • Summary … •
Enables in-line broadband spectrum measurements • Provides extra feedback loop signal
for system broadband spectrum optimization … • It is advantageous to implement in-line
broadband spectrum metrology and control system in the scanner …
以上显示的是最相近的搜索结果。 查看全部搜索结果