Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators
H Campanella, J Esteve, J Montserrat, A Uranga… - Applied physics …, 2006 - pubs.aip.org
A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular
applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a
(001) Si wafer, and released by surface micromachining of silicon. Two experiments are
proposed to test the mass sensing performance of the resonators:(a) distributed loading with
a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a
C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode …
applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti/Pt on a
(001) Si wafer, and released by surface micromachining of silicon. Two experiments are
proposed to test the mass sensing performance of the resonators:(a) distributed loading with
a MgF2 film by means of physical vapor deposition and (b) localized mass growing of a
C/Pt/Ga composite using focused-ion-beam-assisted deposition, both on the top electrode …
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