Low loss silicon waveguides for application of optical interconnects
P Dong, W Qian, S Liao, H Liang… - IEEE Photonics …, 2010 - ieeexplore.ieee.org
IEEE Photonics Society Summer Topicals 2010, 2010•ieeexplore.ieee.org
… Abstract: We present low loss shallow-ridge silicon waveguides with an average
propagation loss of 0.274 dB/cm in the C-band, which can find applications in chip-level
optical interconnects. … With this technique, however, it may be difficult to control the critical
dimensions of fabricated devices since the thermal oxidation rate would be affected by device
density, hard mask thickness, and the cross section of the waveguides. Here, we report
low loss silicon ridge waveguides fabricated on SOI substrates with a top silicon thickness …
propagation loss of 0.274 dB/cm in the C-band, which can find applications in chip-level
optical interconnects. … With this technique, however, it may be difficult to control the critical
dimensions of fabricated devices since the thermal oxidation rate would be affected by device
density, hard mask thickness, and the cross section of the waveguides. Here, we report
low loss silicon ridge waveguides fabricated on SOI substrates with a top silicon thickness …
We present low loss shallow-ridge silicon waveguides with an average propagation loss of 0.274 dB/cm in the C-band, which can find applications in chip-level optical interconnects.
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