estimate the residual carbon concentration in MBE GaAs to be~ 2× 10 14 cm− 3. This value
agrees well with the total compensating acceptor concentration calculated from electrical
measurements and thus confirms that carbon is the dominant residual acceptor in MBE
GaAs. In high purity MBE GaAs films grown at substrate temperatures between 545° C and
625° C a band of at least nine luminescence peaks is observed in the 1.471 eV to 1.491 eV …