Low temperature synthesis and electrical properties of PbTiO3 thin films prepared by the polymeric precursor method

FM Pontes, JHG Rangel, ER Leite, E Longo, JA Varela… - Thin Solid Films, 2000 - Elsevier
Ferroelectric PbTiO3 thin films were successfully prepared on a Pt (111)/Ti/SiO2/Si (100)
substrate for the first time by spin coating, using the polymeric precursor method. X-ray
diffraction patterns of the films indicate that they are polycrystalline in nature. This method
allows low temperature (500° C) synthesis and high electrical properties. The multilayer
PbTiO3 thin films were granular in structure with a grain size of approximately 110–120 nm.
A 380-nm-thick film was obtained by carrying out four cycles of the spin-coating/heating …
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