Low temperature synthesis of Mo2BC thin films
H Bolvardi, J Emmerlich, S Mráz, M Arndt, H Rudigier… - Thin Solid Films, 2013 - Elsevier
Emmerlich et al.[J. Phys. D: Appl. Phys. 2009, p42] reported the formation of Mo 2 BC
coatings at a substrate temperature of 900° C by combinatorial magnetron sputtering. This
synthesis temperature limits the choice of substrate materials severely. Here, utilizing high
power pulsed magnetron sputtering (HPPMS), the synthesis temperature was reduced to
380° C, while the measured elastic modulus and lattice parameters of the as-deposited films
are consistent with ab-initio data. Since the crystallization of amorphous Mo 2 BC powder …
coatings at a substrate temperature of 900° C by combinatorial magnetron sputtering. This
synthesis temperature limits the choice of substrate materials severely. Here, utilizing high
power pulsed magnetron sputtering (HPPMS), the synthesis temperature was reduced to
380° C, while the measured elastic modulus and lattice parameters of the as-deposited films
are consistent with ab-initio data. Since the crystallization of amorphous Mo 2 BC powder …
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