Low-cost temperature-compensated thermoresistive micro calorimetric flow sensor by using 0.35 μm CMOS MEMS technology
In this paper, a low-cost Temperature-compensated Thermoresistive Micro Calorimetric Flow
(T2MCF) sensor by using a commercial 0.35 μm 2P4M CMOS MEMS technology is reported.
For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230
mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude
better than the reported micro calorimetric flow sensors. The experimental results of T2MCF
sensor under different ambient temperatures Ta of 22° C~ 48° C showed the excellent …
(T2MCF) sensor by using a commercial 0.35 μm 2P4M CMOS MEMS technology is reported.
For nitrogen flow, the fabricated T2MCF sensor achieves a normalized sensitivity of 230
mV/(m/s)/mW with respect to the input heating power, which is two orders of magnitude
better than the reported micro calorimetric flow sensors. The experimental results of T2MCF
sensor under different ambient temperatures Ta of 22° C~ 48° C showed the excellent …
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